Levitation Micro-Systems: Applications to Sensors and Actuators

Levitation Micro-Systems: Applications to Sensors and Actuators
PDF
  • eBook:
    Levitation Micro-Systems: Applications to Sensors and Actuators
  • Author:
    Kirill Poletkin
  • Edition:
    1st ed. 2021 edition
  • Categories:
  • Data:
    November 19, 2020
  • ISBN:
    3030589072
  • ISBN-13:
    9783030589073
  • Language:
    English
  • Pages:
    183 pages
  • Format:
    PDF

Book Description
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.

Content

1. Introduction to Levitation Micro-Systems
2. Micro-Coil Fabrication Techniques
3. Analytical Modelling
4. Quasi-finite Element Modelling
5. Inductive Levitation Micro-Systems
6. Hybrid Levitation Micro-Systems
7. Mechanical Thermal Noise in Levitation Micro-Gyroscopes

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